Servo Amplifier                Y-Z Control Electronics Board    Servo Amp Module        Aerotech Controller DR500                                                                                                                   603641-03A

 Copley Controls Corp             NSK Driver                    NSK Driver          Nikon Yaskawa Motion Controller

             800-605                  EP0810AF3-05            ESA-Y300BA25-21        XU-DV0704X & XU-DV0704Z